Title:
LOAD SENSOR USING QUARTS OSCILLATOR
Document Type and Number:
Japanese Patent JP2002257644
Kind Code:
A
Abstract:
To provide a load sensor improved in sensitivity by preventing the occurrence of a mechanical deformation in a direction perpendicular to the plate surface of a quart piece and detecting a varying frequency of oscillation only caused by the load.
The load sensor using a quarts oscillator measures the load in such a manner that a tractive force corresponding to the load is applied to opposite periphery sections of the quartz piece, and the varying frequency of oscillation on the basis of the stress sensitivity of the quartz piece in the tractive direction is detected. The opposite periphery sections of the quartz piece are formed as a holding section so that its thickness is larger than that of the oscillating section in a central region.
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Inventors:
CHIBA AKIO
ONO KOZO
KUROSAWA TAMOTSU
ONO KOZO
KUROSAWA TAMOTSU
Application Number:
JP2001056713A
Publication Date:
September 11, 2002
Filing Date:
March 01, 2001
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
G01L1/16; G01L1/10; H01L41/08; H01L41/18; (IPC1-7): G01L1/16; G01L1/10; H01L41/08; H01L41/18