PURPOSE: To provide the magnetic head having high reproduction efficiency by greatly improving the magnetic permeability of soft magnetic thin films having a high saturation magnetic flux density and high heat resistance by both effects of finer crystallization and formation of multipler layers.
CONSTITUTION: The soft magnetic thin films 23 are formed on a nonmagnetic substrate 21, all the surfaces of which consist of slopes by forming V-grooves 22. The soft magnetic thin films 23 consist of a magnetic metallic layer 24 and a nonmagnetic intermediate layer 25. An RF sputtering device is used for forming the soft magnetic thin films. An FeTaC alloy is used as the magnetic metallic layer and SiO2 as the nonmagnetic intermediate layer 25. The soft magnetic thin films are subjected to a heat treatment at, for example, 600°C and thereafter, the crystal grain size (α-Fe) and magnetic permeability are measured. The crystal grain size is determined from the peak half value by X-ray diffraction. The crystal grain size of this film is made finer as the layer thickness is made thinner. The magnetic permeability is increased by making the layer thickness smaller. Then, the magnetic permeability of the soft magnetic thin films having a high saturation magnetic flux density and high heat resistance is increased by the finer crystallization and the formation of the multipler layers.
INADA KENKICHI
SASAJIMA SHIYUUZOU
KUMASAKA TAKAYUKI
