Title:
磁気センサ及び検査装置
Document Type and Number:
Japanese Patent JP7284739
Kind Code:
B2
Abstract:
According to one embodiment, a magnetic sensor includes a sensor part, a first circuit, and a second circuit. The sensor part includes a magnetic element part, first and second conductive members. The magnetic element part includes first to fourth magnetic elements. The first conductive member includes first to third conductive portions, and first and second middle portions. The second conductive member includes fourth to sixth conductive portions, and third and fourth middle portions. The first circuit is electrically connected to the third and sixth conductive portions. The first circuit is configured to supply a first current between the third and sixth conductive portions. The second circuit is electrically connected to a first connection point and a second connection point. The second circuit is electrically connected to first and second connection points. The second circuit is configured to supply a second current between the first and second connection points.
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Inventors:
Hitoshi Iwasaki
Satoshi Shiratori
Kikitsu Satoshi
Yoshihiro Higashi
Satoshi Shiratori
Kikitsu Satoshi
Yoshihiro Higashi
Application Number:
JP2020153915A
Publication Date:
May 31, 2023
Filing Date:
September 14, 2020
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01R33/09; G01R33/02; H01L29/82; H10N50/10
Domestic Patent References:
| JP2018155719A | ||||
| JP5264695A | ||||
| JP6235759A | ||||
| JP20173336A | ||||
| JP6307872A | ||||
| JP6222082A |
Foreign References:
| US20110285395 |
Attorney, Agent or Firm:
Masahiko Hyugaji
Junichi Kozaki
Hiroshi Ichikawa
Tatsuaki Shirai
Takato Uchida
Isao Takeuchi
Junichi Kozaki
Hiroshi Ichikawa
Tatsuaki Shirai
Takato Uchida
Isao Takeuchi