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Title:
MANUFACTURE OF OXIDE SYSTEM SUPERCONDUCTIVE FILM
Document Type and Number:
Japanese Patent JPH01151110
Kind Code:
A
Abstract:
PURPOSE:To manufacture an oxide system superconductive film having nonorientation, a thick film thickness, and a high critical temperature by laminating film bodies with a series of processes composed of a film forming process and a heat treatment process repeated two times or more, and also changing an application direction in the film forming process at every film body. CONSTITUTION:A film body B1, composed of an oxide superconductor or its precursor body, of the first layer is formed with a given film thickness on a base substrate A. Then a heat treatment is applied to the body B1. After that a film body B2 of the second layer, a film body B3 of the third layer... a film body Bn, are laminated in order on the body B1 with the series of processes, composed of a film forming process and a heat treatment process forming such body B1, repeated required times. In this case, an application direction is made to a cross direction to the application direction of the body B, of the first layer when the body B2 of the second layer is formed by an application method. Similarly, the application direction in the body B3 of the third layer is made to cross the application direction of the body B2 of the second layer. An oxide system superconductive film B composed of film bodies B1, B2... Bn is manufactured on the base substrate A with the application direction changed at every film body in the same manner.

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Inventors:
IKENO YOSHIMITSU
KONO TSUKASA
SARUWATARI KOICHI
MAEJIMA SEIJU
Application Number:
JP30999987A
Publication Date:
June 13, 1989
Filing Date:
December 08, 1987
Export Citation:
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Assignee:
FUJIKURA LTD
International Classes:
C04B41/89; C01B13/14; C01G1/00; H01B12/06; H01B13/00; H01L39/24; H05K9/00; (IPC1-7): C01B13/14; C04B41/89; H01B12/06; H01B13/00; H01L39/24; H05K9/00
Attorney, Agent or Firm:
Masatake Shiga (2 outside)



 
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