Title:
MANUFACTURING APPARATUS FOR CARBON NANOTUBE
Document Type and Number:
Japanese Patent JP2005060131
Kind Code:
A
Abstract:
To reduce the use amount of a source gas and to reduce the cost of the product by enclosing the source gas into a reaction chamber.
The subject manufacturing apparatus for carbon nanotubes is equipped with: a sealed reaction chamber 1 covered with a heat insulating material layer 4; an inner cylinder 2 disposed in the chamber 1 and comprising a heat conductive material; a heater wire 3 disposed in the inner cylinder 2; a metal base 6 for growing carbon nanotubes externally attached to a holding member 5 covering the inner cylinder 2; a gas stirring fan 7 disposed in the reaction chamber 1; a supply pipe 8 for a diluted source gas connected to the reaction chamber 1; and a gas sucking pipe 9.
Inventors:
INOUE TETSUYA
DAIKU HIROYUKI
DAIKU HIROYUKI
Application Number:
JP2003207968A
Publication Date:
March 10, 2005
Filing Date:
August 20, 2003
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO
International Classes:
C01B31/02; C23C16/26; (IPC1-7): C01B31/02; C23C16/26
Attorney, Agent or Firm:
Norihiko Hibi
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko
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