To provide the manufacturing method of a dielectric film in which a stable property can be usually obtained by controlling crystallized state comparatively easily, and a manufacturing method of a liquid injecting head capable of improving the property of a piezo-electric element.
The manufacturing method of the dielectric film comprises an applying process of forming a dielectric precursor film by applying the sol of an organometallic compound, a drying process of drying the dielectric precursor film, a degreasing process of degreasing the above-mentioned dielectric precursor film, and a calcining process of calcining the above-mentioned dielectric precursor film to get the dielectric film. The drying process comprises a first drying process of drying the dielectric precursor film in such a way that the dielectric precursor film is heated at a temperature lower than the boiling point of a solvent, a main solvent of the sol, and that the heating process is kept for a fixed time, and a second drying process of further drying the dielectric precursor film by reheating the film and by keeping the reheating process for a fixed time.
SUMI KOJI
KAZAMA HIRONOBU
SHINPO TOSHINAO
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