Title:
MANUFACTURING METHOD FOR DISPLAY DEVICE, AND VAPOR DEPOSITION DEVICE
Document Type and Number:
Japanese Patent JP2023172257
Kind Code:
A
Abstract:
To suppress the decrease in reliability.SOLUTION: In a manufacturing method for a display device according to one embodiment, a lower electrode is formed over a substrate, a rib having an opening overlapping with the lower electrode is formed, a processing substrate equipped with a partition wall including a lower part existing on the rib and an upper part existing on the lower part and protruding from a side surface of the lower part is prepared, an organic layer is formed on the lower electrode in the opening, and an etching stopper layer is formed on the organic layer. In the step of forming the etching stopper layer, the processing substrate is conveyed into a chamber, a material for forming the etching stopper layer is emitted from a vapor deposition source, which is tilted with respect to a normal line of the processing substrate, inside the chamber, the processing substrate is conveyed while rotating in a surface orthogonal to the normal line, and the material emitted from the vapor deposition source is deposited on the processing substrate.SELECTED DRAWING: Figure 10
Inventors:
MIZUKOSHI HIROBUMI
FUKUDA KAICHI
TAKENAKA TAKASHI
TAKAYAMA TAKESHI
FUKUDA KAICHI
TAKENAKA TAKASHI
TAKAYAMA TAKESHI
Application Number:
JP2022083932A
Publication Date:
December 06, 2023
Filing Date:
May 23, 2022
Export Citation:
Assignee:
JAPAN DISPLAY INC
International Classes:
H05B33/10; C23C14/24; G09F9/00; G09F9/30; H05B33/04; H05B33/12; H05B33/22; H05B33/26; H10K50/10; H10K59/10
Attorney, Agent or Firm:
Suzue International Patent Office