To provide a method for manufacturing a solid electrolytic capacitor of a large capacity having a through hole electrode, which is excellent in high frequencies and productivity.
The method comprises a process for forming a dielectric film 2 on the surface of a porous valve metal foil 1, a process for forming a solid electrolyte layer 3, a process for forming a collector layer 4, a process for forming a resist film 10, a process for forming a through hole 9 in the valve metal foil 1, a process for effecting chemical treatment to the inner wall of the through hole 9 and the other surface of the valve metal foil 1, a process for forming an insulating layer 5 on the inner wall of the through hole 9 and the other surface of the valve metal foil 1, a process for separating the resist film 10, and a process for forming the through hole electrode 6 in the through hole 9 to establish an electrical connection with the collector layer 4.
FUJII TATSUO
MIKI KATSUMASA
MIDO YUJI
KIMURA RYO
Tomoyasu Sakaguchi
Hiroki Naito