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Patent Searching and Data


Title:
MASK HOLDER
Document Type and Number:
Japanese Patent JPS61294441
Kind Code:
A
Abstract:

PURPOSE: To assure stable operation and inexpensive manufacture by fixing a mask by the magnetic force of a permanent magnet and energizing a solenoid coil to offset the magnetic force at the joint surfaces of a holder body and mask frame thereby detaching the mask.

CONSTITUTION: A magnetic flux arrives via the magnetic path of the permanent magnet 4 and the mask frame 6 at a yoke 2 and as a result the frame 6 is attracted to the yoke 2 when the frame 6 is brought near to the yoke 2. A closed magnetic path consisting of the permanent magnet 4, the mask frame 6 and the yoke 2 is formed after the attraction. The frame 6 is kept attracted to the magnet 4 by the magnetic field. Electric current is passed from a power source via lead wires 8 to the solenoid coil 3 to generate the magnetic lines of force repulsing from each other in the magnetic path formed of the permanent magnet. The magnetic force of the permanent magnet is thus instantaneously negated and the frame 6 is detached from the yoke 2. The holder is thereby stably operated to surely hold the mask without being affected by environment.


Inventors:
KARIYA TAKUO
Application Number:
JP13594285A
Publication Date:
December 25, 1986
Filing Date:
June 24, 1985
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/30; G03F1/00; G03F1/66; G03F7/20; H01L21/027; (IPC1-7): G03F1/00; H01L21/30
Attorney, Agent or Firm:
Tatsuo Ito