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Title:
極限紫外線露光用マスク及びブランク並びにパターン転写方法
Document Type and Number:
Japanese Patent JP4529359
Kind Code:
B2
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Inventors:
Tadashi Matsuo
Takashi Haraguchi
Koichiro Kanayama
Application Number:
JP2003050634A
Publication Date:
August 25, 2010
Filing Date:
February 27, 2003
Export Citation:
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Assignee:
Toppan Printing Co., Ltd.
International Classes:
H01L21/027; G03F1/22; G03F1/24
Domestic Patent References:
JP2002246299A
JP2004006798A



 
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