Title:
MEASURING HEAD FOR VACUUM GAGE
Document Type and Number:
Japanese Patent JPS62129730
Kind Code:
A
Abstract:
A measuring head for a vacuum gauge. An essentially cylindrical housing encloses a measuring cell which is sealed in a vacuum tight manner against the surrounding atmosphere and is connectable with an evacuatable cavity. A measuring filament for producing an electrical signal corresponding to the pressure in the measuring cell is disposed in the measuring cell. The measuring filament is disposed approximately perpendicularly to the axial direction of the housing.
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Inventors:
RUUDORUFU FUROOSUBATSUHA
GIYUNTAA RAIHI
HANSU YOAHIMU SHIYUUBERUTO
GIYUNTAA RAIHI
HANSU YOAHIMU SHIYUUBERUTO
Application Number:
JP27549586A
Publication Date:
June 12, 1987
Filing Date:
November 20, 1986
Export Citation:
Assignee:
LEYBOLD HERAEUS GMBH & CO KG
International Classes:
G01L21/12; (IPC1-7): G01L21/12
Attorney, Agent or Firm:
Toshio Yano