PURPOSE: To prevent a bubble fault by supplying and applying directly a photosensitive liquid onto a supporting body at constant supply speed with the lapse of time by an extruding nozzle.
CONSTITUTION: When in an extruding nozzle 20, a photosensitive liquid L from a tank 7 is fed forcedly through a filter 9 by a pump 8, the photosensitive liquid L flows out of a slit 22, while extending over the whole width of a pocket 23. Subsequently, the photosensitive liquid L allowed to flow out is applied directly onto a supporting body B. Accordingly, as long as the photosensitive liquid L is supplied to the extruding nozzle 20 at constant supply speed by the pump 8, primary film thickness becomes constant. In such a manner, when the photosensitive liquid is applied directly to the supporting body by the extruding nozzle, as long as the photosensitive liquid is supplied at constant supply speed, no only the fluctuation of primary film thickness can be prevented but also the factor of generation of a bubble is eliminated completely, therefore, a bubble fault can be prevented surely.
SUZUKI YASUYUKI
KOBAYASHI SHIGERU
GOTO SEI