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Title:
METHOD AND ARRANGEMENT FOR MANUFACTURING SAMPLE FOR MICROSTRUCTURAL MATERIAL DIAGNOSIS AND THE SAMPLE
Document Type and Number:
Japanese Patent JP2014202756
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a sample for microstructural material diagnosis, especially for transmission electron microscopy examination, for scanning electron microscopy examination, for transmission electron-backscatter diffraction, for Rutherford backscatter diffraction, for elastic recoil detection analysis, for X-ray absorption spectroscopy, or for X-ray diffraction.SOLUTION: The method for manufacturing a sample for microstructural material diagnosis comprises the step of: detaching a basic structure from a preferably flat substrate by irradiating the substrate with a high energy beam, preferably with a laser beam. The basic structure comprises a supported structure, the supported structure being supported by a supporting structure, preferably by a cantilever beam at least at one of its both ends, preferably at both of its ends, the supporting structure being configured to be held by a jig, preferably to be clamped in the jig. The method further comprises the step of thinning the supported structure at least partially by cutting, preferably by grazing its surface, preferably at least one of its side faces and/or of its front faces, preferably two opposing side faces, with the high energy beam.

Inventors:
KRAUSE MICHAEL
THOMAS HOECHE
Application Number:
JP2014078137A
Publication Date:
October 27, 2014
Filing Date:
April 04, 2014
Export Citation:
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Assignee:
FRAUNHOFER GES FORSCHUNG
International Classes:
B23K26/00; G01N1/28; B23K26/361; B23K26/38; G01N23/225
Domestic Patent References:
JP2012042461A2012-03-01
JP2008020450A2008-01-31
JP2011221023A2011-11-04
JP2004245841A2004-09-02
JP2012189400A2012-10-04
JP2008170225A2008-07-24
JPH11160210A1999-06-18
JP2002110491A2002-04-12
JP2002333387A2002-11-22
JPH11144659A1999-05-28
JPH11160210A1999-06-18
JP2002110491A2002-04-12
JP2002333387A2002-11-22
JPH11144659A1999-05-28
JP2014524580A2014-09-22
JP2012042461A2012-03-01
JP2008020450A2008-01-31
JP2011221023A2011-11-04
JP2004245841A2004-09-02
JP2012189400A2012-10-04
JP2008170225A2008-07-24
Foreign References:
DE102008000306A12009-08-27
WO2013026707A12013-02-28
WO2013026707A12013-02-28
DE102008000306A12009-08-27
Attorney, Agent or Firm:
Patent business corporation R&C



 
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