To improve efficiency in the decomposition of organic substances, miniaturize a circulation type pure water-producing device, achieve high-speed processing and reduce a running cost even in case that pure water whose TOC (total organic carbon) concentration is extremely low is produced by using the pure water-producing device concerned.
A pure water-producing method includes at least: an irradiation step in which water to be treated, whose TOC is 10 ppb or below, is irradiated with ultraviolet rays; and a step in which hydrogen peroxide, which is contained in the water to be treated after the irradiation step, is removed; to produce pure water. In this case, the pure water, whose amount exceeds its use amount at a use point, is circulated, at least as part of the water to be treated, to the irradiation step. Further, a step, in which hydrogen peroxide is added to the water to be treated, is additionally provided prior to the irradiation step.
TAKAHASHI KAZUSHIGE
SUGAWARA HIROSHI
JP2002210494A | 2002-07-30 | |||
JP2008136914A | 2008-06-19 | |||
JP2010017633A | 2010-01-28 | |||
JP2010069460A | 2010-04-02 |
WO2009122884A1 | 2009-10-08 | |||
WO2009122884A1 | 2009-10-08 | |||
WO2009082008A1 | 2009-07-02 |
Ishibashi Masayuki
Masaaki Ogata
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