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Title:
METHOD OF FORMING ULTRAFINE CONDUCTOR LAYER
Document Type and Number:
Japanese Patent JPS5969990
Kind Code:
A
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Inventors:
TAKAKURA YOSHINORI
Application Number:
JP18030882A
Publication Date:
April 20, 1984
Filing Date:
October 14, 1982
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H05K3/24; C23C14/04; H05K1/00; H05K3/14; (IPC1-7): C23C13/06; H05K3/06
Attorney, Agent or Firm:
Shinichi Kusano



 
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