Title:
METHOD OF MANUFACTURING ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING CERAMIC HEATER
Document Type and Number:
Japanese Patent JP2001267405
Kind Code:
A
Abstract:
To provide an electrostatic chuck whose chuck force does not vary by positions and which can suck a semiconductor wafer uniformly.
In this method of manufacturing an electrostatic chuck, a conductive paste for electrodes is printed on a green sheet having a surface roughness at Rmax of 200 μm or less. Subsequently, another green sheet is laminated on the green sheet to form a laminate and then sintered.
Inventors:
HIRAMATSU YASUJI
ITO YASUTAKA
ITO YASUTAKA
Application Number:
JP2000071797A
Publication Date:
September 28, 2001
Filing Date:
March 15, 2000
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
B23Q3/15; B23B5/22; B28B11/00; C04B35/00; C04B35/117; C04B35/581; C04B35/622; C04B35/645; H01C17/065; H01C17/28; H01L21/00; H01L21/683; H02N13/00; H05B3/14; H05B3/16; H05B3/20; H05B3/68; (IPC1-7): H01L21/68; B23Q3/15; B28B11/00; C04B35/622; C04B35/00; H05B3/16; H05B3/20; H05B3/68
Attorney, Agent or Firm:
Yasuo Yasutomi (2 outside)
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