Title:
METHOD FOR MANUFACTURING FERRODIELECTRIC FILM AND MATERIAL SOLUTION
Document Type and Number:
Japanese Patent JP2008258638
Kind Code:
A
Abstract:
To provide a method for manufacturing highly reliable ferrodielectric film containing no lead, and to provide a ferroelectric capacitor and a dielectric memory.
The method for manufacturing the ferrodielectric film 101 includes the steps of: (a) mixing polycarboxylate containing niobium element, polycarboxylate containing bismuth element, polycarboxylic acid or polycarboxylic acid ester, and organic solvent; and (b) applying the mixed solution on a base and then heat treating it to form the ferrodielectric film composed of BiNbO4.
Inventors:
KIJIMA TAKESHI
HAMADA YASUAKI
FURUBAYASHI TOMOKAZU
HAMADA YASUAKI
FURUBAYASHI TOMOKAZU
Application Number:
JP2008114743A
Publication Date:
October 23, 2008
Filing Date:
April 25, 2008
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/316; C01G33/00; H01L21/8246; H01L27/105
Domestic Patent References:
| JP2001298164A | 2001-10-26 | |||
| JP2001261611A | 2001-09-26 | |||
| JP2004253680A | 2004-09-09 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Misa Nagata
Mitsue Obuchi
Misa Nagata
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