To provide a method for manufacturing piezoelectric element, wherein a displacement amount is increased while achieving the relaxation of strain and the stabilization of crystal grain growth during burning.
The method for manufacturing a piezoelectric element 10 in this invention is a piezoelectric element manufacturing method for manufacturing the piezoelectric element 10 by burning a laminate 11 formed by alternately laminating a piezoelectric layer 12 and inner electrodes 13A, 13B. A piezoelectric material composing the piezoelectric layer 12 contains a TiO2 material, a ZrO2 material and a PbO2 material as main components, and P2O5 contained in the TiO2 and ZrO2 materials is mixed in the piezoelectric material in a range of 40 to 350 ppm. Inventors find out that when P is contained in the piezoelectric material and the P is mixed as P2O5 only by an amount in the prescribed range from the TiO2 and ZrO2 materials, the relaxation of strain and the stabilization of crystal grain growth during burning are achieved and the displacement amount of the piezoelectric element 10 is increased.
WATANABE MATSUMI
NIWA YASUO
| JP2007063052A | 2007-03-15 | |||
| JPS59207841A | 1984-11-26 |
| WO2006129434A1 | 2006-12-07 |
Shiro Terasaki
Hiroaki Aoki
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