Title:
METHOD FOR MEASURING CAPACITANCE OF CAPACITOR
Document Type and Number:
Japanese Patent JP2002076079
Kind Code:
A
Abstract:
To measure a capacitance of a capacitor accurately and quickly.
This invention is a method for measuring the capacitance of a capacitor comprising first region 201 formed of a semiconductor or a conductor, insulation film 205 formed on this first region, and a conductive second region 206 formed on this insulation film. The measuring method comprises a process of measuring capacitance and loss as changing bias voltage sequentially applied on the capacitor at plural frequencies under each bias voltage, and a process of searching for compensated capacitance sequentially under each bias voltage based on the measured values of capacitance and loss at plural frequencies.
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Inventors:
NARA AKIKO
YASUDA NAOKI
SATAKE HIDEKI
YASUDA NAOKI
SATAKE HIDEKI
Application Number:
JP2000255844A
Publication Date:
March 15, 2002
Filing Date:
August 25, 2000
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01R31/26; G01N27/22; G01R27/26; H01L21/66; (IPC1-7): H01L21/66; G01N27/22; G01R27/26; G01R31/26
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)