To solve such a problem that the detailed part of interest in a relatively thick sample for forming an image of an electronic microscope can not be visualized in a form of SME image due to its position located inside the sample.
An ion abrasion is applied to a frozen sample by a manner of exposing an intended cross section in order to expose the cross section of the detailed part of interest. Afterwards, the exposed cross section is etched by a controlled manner through a sublimation, by the above, the detailed part of interest is approached by a very accurate manner, and a good detailed part is enabled to visualize, and finally an intended SME image is obtained. By repeating the above process, a large number of cross sections are continuously visualized, and a three-dimensional display of the sample becomes possible.
HAYLES MICHAEL FREDERICK
Shinsuke Onuki
Tadashige Ito