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Patent Searching and Data


Title:
METHOD OF OBTAINING OPTICAL IMAGE OF PARTICLE FOR OPTICAL DEVICE FOR PARTICLE
Document Type and Number:
Japanese Patent JP2004134394
Kind Code:
A
Abstract:

To solve such a problem that the detailed part of interest in a relatively thick sample for forming an image of an electronic microscope can not be visualized in a form of SME image due to its position located inside the sample.

An ion abrasion is applied to a frozen sample by a manner of exposing an intended cross section in order to expose the cross section of the detailed part of interest. Afterwards, the exposed cross section is etched by a controlled manner through a sublimation, by the above, the detailed part of interest is approached by a very accurate manner, and a good detailed part is enabled to visualize, and finally an intended SME image is obtained. By repeating the above process, a large number of cross sections are continuously visualized, and a three-dimensional display of the sample becomes possible.


Inventors:
GEURTS REMCO THEODORUS JOHANNE
HAYLES MICHAEL FREDERICK
Application Number:
JP2003310320A
Publication Date:
April 30, 2004
Filing Date:
September 02, 2003
Export Citation:
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Assignee:
FEI CO
International Classes:
G01N23/225; G01N1/28; G01N1/32; G01N1/42; H01J37/28; H01J37/317; (IPC1-7): H01J37/28; G01N1/28; G01N1/32; G01N23/225; H01J37/317
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito