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Title:
METHOD FOR PRODUCING HEATING ELEMENT FOR METAL EVAPORATION
Document Type and Number:
Japanese Patent JP2009209004
Kind Code:
A
Abstract:

To provide a method for producing a ceramic sintered body suitable for producing a metal evaporation heating element in which the occurrence of cracks upon dry area generation is suppressed.

The method for producing a ceramic sintered body is provided by which raw material powder containing titanium diboride (TiB2) powder and boron nitride (BN) powder is molded then sintered in a nonoxidizing atmosphere. The method is characterized in that in the particle sizes by volume measured by a laser diffraction scattering type particle size distribution measurement device, the frequency of the region of 5 m is 15% to the whole region, the frequency of the region of 5 to 20 m is 75% to the whole region, and the frequency of the region of 20 to 62 m is 10% to the whole region. In the method, composition of the raw material powder preferably contains 40 to 60 pts.mass of TiB2, 31.5 to 58.9 pts.mass of BN, 0.3 to 2.0 pts.mass of AlN, 0.3 to 3.0 pts.mass of Sr compound and 0.5 to 3.5 pts.mass of Fe or Fe compound.


Inventors:
IGARASHI ATSUKI
YOKOTA HIROSHI
Application Number:
JP2008054231A
Publication Date:
September 17, 2009
Filing Date:
March 05, 2008
Export Citation:
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Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
C04B35/58; C04B35/583; C23C14/24