Title:
シロキサン化合物含有ガスの精製方法
Document Type and Number:
Japanese Patent JP4096528
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for refining a siloxane compound-containing gas, capable of obtaining refined gas by inexpensively and efficiently removing a siloxane compound in the siloxane compound-containing gas. SOLUTION: This method for refining the siloxane compound-containing gas comprises introducing a siloxane compound-containing gas into a gas refining apparatus and removing the siloxane compound contained in the gas to obtain the refined gas. In the refining method, the concentration of the siloxane compound contained in untreated gas before introducing into the gas refining apparatus and/or a gas after treatment after introduction is substantially continuously detected and operation specification of the gas refining apparatus is determined based on the resultant siloxane compound concentration.
Inventors:
Keizo Hamaguchi
Masanori Nagato
Akira Shimizu
Hiroshi Shimizu
Tokukichi Kawai
Masanori Nagato
Akira Shimizu
Hiroshi Shimizu
Tokukichi Kawai
Application Number:
JP2001193350A
Publication Date:
June 04, 2008
Filing Date:
June 26, 2001
Export Citation:
Assignee:
JFE Engineering Corporation
International Classes:
C10L3/10; G01N27/62; B01D53/34; B01D53/72; G01N21/61; G01N30/88
Domestic Patent References:
| JP55151862U | ||||
| JP5133870A |
Other References:
Fresenius J.Anal.Chem.,1996年,354,p.66-71
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Makoto Nakamura