To provide a microhollow device, which comprises a hollow structure, capable of being easily manufactured at a low cost by applying a processing technique due to μTAS and constituting a fluid element, such as optical cell for measuring absorbance, a sample feed flow channel, a pressure chamber, a sample mixing tank, a liquid feed pump, etc. and a composite system of them, especially a CBC (Complete Blood Count: blood cell count) suitable for performing the counting of blood corpuscles in trace amount of blood, and to provide a manufacturing method of them.
The microhollow device is constituted of a base board 12, the thick-film resist 14 comprising a photosetting resin formed on the base board and the transparent cover board 16, to which a developer injecting hole is provided, placed on the thick film resist. The thick-film resist is soft-baked and subjected to exposure and baking treatment from the surface of the cover board, to make the upper and lower boards joint simultaneously with the curing of the thick-film resist. Developer is injected from the developing liquid injection holes 15a and 15b of the cover board, and unwanted parts are dissolved and removed to form a required microhollow structure 20.
HATA SEIICHI
SHIMOKAWABE AKIRA
TOKYO INST TECH
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