Title:
MULTISPINDLE MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JPS6091203
Kind Code:
A
Abstract:
The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes. Each measurement axis is provided with at least one interferometer head which consists of a beam splitter, reference mirror and photoelectric detector. The interferometer heads are supplied by a monomode fiber from a single stationary laser generator.
Inventors:
HORUSUTO KUNTSUMAN
KAARU SHIETSUPERURE
GERUHARUTO TORIIPU
KAARU SHIETSUPERURE
GERUHARUTO TORIIPU
Application Number:
JP19589284A
Publication Date:
May 22, 1985
Filing Date:
September 20, 1984
Export Citation:
Assignee:
ZEISS STIFTUNG
International Classes:
G01B9/02; G01B11/00; G01B11/03; (IPC1-7): G01B11/00
Domestic Patent References:
| JPS5943303A | 1984-03-10 |
Attorney, Agent or Firm:
Toshio Yano
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