【発明の名称】半導体集積回路の製造方法

Title:

【発明の名称】半導体集積回路の製造方法

Document Type and Number:

Japanese Patent JP3036769

Kind Code:

B2

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JPS52186	SEMICONDUCTOR
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Inventors:

Kazuo Takeda
Teruo Tabata
Nobuyuki Sekikawa
Yoshiaki Sano

Application Number:

JP34081389A

Publication Date:

April 24, 2000

Filing Date:

December 28, 1989

Export Citation:

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Assignee:

Sanyo Electric Co., Ltd.

International Classes:

H01L29/73; H01L21/331; H01L21/8226; H01L21/8228; H01L27/082; H01L29/08; H01L29/732; (IPC1-7): H01L21/8226; H01L21/331; H01L27/082; H01L29/73

Domestic Patent References:

JP5092686A
JP63155657A

Attorney, Agent or Firm:

Masamasa Shibano

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