Title:
MANUFACTURE OF SURFACE ACOUSTIC WAVE ELEMENT
Document Type and Number:
Japanese Patent JPH0590860
Kind Code:
A
Abstract:
PURPOSE: To provide a method for manufacturing a highly reliable surface acoustic element having superior performance that can operate in a higher frequency range by combining a material having a higher propagation speed of an acoustic wave and a piezoelectric body.
CONSTITUTION: In a method for manufacturing a surface acoustic wave element, on a substrate 1, electrode layers 3a and 3b, a piezoelectric body layer 4, and an insulating layer 2 in which a propagation speed of an acoustic wave is higher than that in the layer 4 are laminated, the piezoelectric body layer 4 is formed by means of sputter deposition, and also the insulating layer 2 is formed by means of vapor phase synthesis.
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Inventors:
YAGOU AKIHIRO
NAKAHATA HIDEAKI
SHIKADA SHINICHI
FUJIMORI NAOHARU
NAKAHATA HIDEAKI
SHIKADA SHINICHI
FUJIMORI NAOHARU
Application Number:
JP24974591A
Publication Date:
April 09, 1993
Filing Date:
September 27, 1991
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H03H3/08; (IPC1-7): H03H3/08
Attorney, Agent or Firm:
Hisami Fukami (4 outside)
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