PURPOSE: To obtain an electron beam aligner of cell projection system which can accurately transfer an electron beam image of a specified size on a specimen, without degrading the resolution of the electron beam image to be transferred on the specimen, even when the dimensional precision of a general purpose shape aperture is low.
CONSTITUTION: The following are provided; a condenser lens 3 for projecting an electron beam outputted from an electron gun 1 on a first aperture mask P1, a projection lens 5 for projecting the beam, which has passed the mask P1, on a second aperture mask P2, a demagification lens for demagnifying a shaped beam which has passed the mask P2 and is shaped, and an objective 10 for projecting the demagnified shaped beam on the surface of a specimen 11. The demagnification lens is constituted by using two-stage lenses 6, 7. In the state that the crossover image CO1 of the electron beam is fixed at the center of the objective 10, the demagnification ratio of the shaped beam is changed.
WAKAYAMA SHIGERU
TAMAMUSHI SHUICHI
WADA KANJI
