Title:
NON-CONTACT SPIN DRYING METHOD AND NON-CONTACT SPIN DRYING DEVICE
Document Type and Number:
Japanese Patent JP2004095880
Kind Code:
A
Abstract:
To dry a substrate without contaminating it in a non-contact spin drying method and a non-contact spin drying device.
A plurality of holes 3 are made on the surface of a first plate 2 which is horizontally disposed. Gas 6 is exhausted from the holes 3 vertically upward with a prescribed flow rate. Gas 6 horizontally floats a substrate to be processed 1 in the space above the first plate 2 so as to hold it. A second plate 4 is disposed above the substrate to be processed 1 so that it faces the first plate 2 in parallel. Gas 7 is exhausted to the substrate to be processed 1 from a hole 5 made in the second plate 4 with a flow rate equal to a direction inclined with a prescribed angle in the direction similar to the circumferential direction.
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Inventors:
SASAKI MAKOTO
Application Number:
JP2002255383A
Publication Date:
March 25, 2004
Filing Date:
August 30, 2002
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
F26B5/08; F26B11/18; G11B5/842; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): H01L21/304; F26B5/08; F26B11/18; G11B5/842; H01L21/68
Attorney, Agent or Firm:
Manabe Kiyoshi
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito
Shoji Kashiwaya
Koichi Watanabe
Toshiro Ito