Title:
ORGANIC LAYER VAPOR DEPOSITION APPARATUS, AND MANUFACTURING METHOD OF ORGANIC LIGHT-EMITTING DISPLAY UTILIZING THE SAME
Document Type and Number:
Japanese Patent JP2014224306
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an organic layer vapor deposition apparatus, and a manufacturing method of an organic light-emitting display utilizing the same.SOLUTION: There are provided the organic layer vapor deposition apparatus, the manufacturing method of the organic light-emitting display utilizing the same, and the organic light-emitting display manufactured thereby. Further, in detail, there are provided: the easily-manufacturable organic layer vapor deposition apparatus applicable easily to a mass production process of a large-sized substrate, and enabling high-definition patterning; and the organic light-emitting display utilizing the same.
Inventors:
LEE SU-HWAN
SUNG UN-CHEOL
KIM MU-HYUNG
LEE DONG KI
SUNG UN-CHEOL
KIM MU-HYUNG
LEE DONG KI
Application Number:
JP2014037413A
Publication Date:
December 04, 2014
Filing Date:
February 27, 2014
Export Citation:
Assignee:
SAMSUNG DISPLAY CO LTD
International Classes:
C23C14/24; C23C14/12; H01L51/50; H05B33/10
Domestic Patent References:
| JP2011049167A | 2011-03-10 | |||
| JP2006274398A | 2006-10-12 | |||
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| JP2003313654A | 2003-11-06 | |||
| JP2011052318A | 2011-03-17 |
Foreign References:
| WO2007099929A1 | 2007-09-07 | |||
| US20120301986A1 | 2012-11-29 | |||
| US20110195184A1 | 2011-08-11 | |||
| WO2004054325A1 | 2004-06-24 | |||
| US20120100282A1 | 2012-04-26 |
Attorney, Agent or Firm:
Hatta international patent business corporation