Title:
PARTICLE-FREE POLISHING FLUID FOR PLANARIZING NICKEL BASE COATING
Document Type and Number:
Japanese Patent JP2005118982
Kind Code:
A
Abstract:
To provide a polishing fluid which can set the surface roughness of a magnetic disk to less than 2 .
The particle-free polishing fluid contains at least one oxidizing agent or a mixture thereof. The particle-free polishing fluid may contain an accelerating agent and/or a complexing agent. If polishing of the magnetic disk is carried out by using the particle-free polishing fluid in the final step of polishing work, the surface roughness of less than about 1.51 is achieved.
Inventors:
AMEEN JOSEPH G
HUYNH DAVE
LIU ZHENDONG
QUANCI JOHN
VESPA LILLIAN
HUYNH DAVE
LIU ZHENDONG
QUANCI JOHN
VESPA LILLIAN
Application Number:
JP2004249453A
Publication Date:
May 12, 2005
Filing Date:
August 30, 2004
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT
International Classes:
B24B37/00; B24B1/00; B24B7/19; B24B7/30; C09G1/04; C09K3/14; C09K13/00; C23F3/06; (IPC1-7): B24B37/00
Attorney, Agent or Firm:
Hajime Tsukuni
Fumio Shinoda
Koshiro Tsukuda
Fumio Shinoda
Koshiro Tsukuda
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