Title:
圧電素子、及び、圧電素子応用デバイス
Document Type and Number:
Japanese Patent JP6760001
Kind Code:
B2
Abstract:
A piezoelectric element includes a first electrode, a piezoelectric layer formed on the first electrode by a solution method and formed of a perovskite-type composite oxide including potassium, sodium, and niobium, and a second electrode provided on the piezoelectric layer, in which the composite oxide further includes lithium and manganese, the content of lithium is 3 mol % to 5 mol % in the total number of moles of metal in the A site, the content of manganese is 5 mol % or less in the total number of moles of metal in the B site, and a lithium measured intensity (CPS) maximum value in the film thickness direction of the piezoelectric layer in SIMS measurement is less than 2.65 times a minimum value.
Inventors:
Kazuya Kitada
Application Number:
JP2016222727A
Publication Date:
September 23, 2020
Filing Date:
November 15, 2016
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L41/187; B41J2/14; B41J2/16; C04B35/495; H01L41/047
Domestic Patent References:
| JP2011211140A | ||||
| JP2013189325A | ||||
| JP2016004855A | ||||
| JP2012156210A |
Foreign References:
| WO2015018915A1 | ||||
| WO2007094115A1 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Satoshi Nakai
Hiroki Matsuoka
Hiroyuki Kurihara
Mountain Saki Yuichiro
Satoshi Nakai
Hiroki Matsuoka
Hiroyuki Kurihara
Mountain Saki Yuichiro