Title:
PIEZOELECTRIC FILTER AND ELECTRONIC COMPONENT HAVING SAME
Document Type and Number:
Japanese Patent JP3941592
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric filter having good attenuation characteristics by increasing resonance Q, and also to provide an electronic component having the filter.
SOLUTION: A plurality of piezoelectric resonators 11, 12 having a piezoelectric thin film 1 formed on a silicon substrate 7 and electrodes 2, 3, 4 facing the substrate 7 with the film 1 sandwiched therebetween are provided so as to have a filter function. The electrode material of the resonator 12 is set so as to be different from that of the other resonator 11, for example, be larger in stiffness.
Inventors:
Masaki Takeuchi
Yamada Hajime
Hideki Kawamura
Colonel Nakamura
Yukio Yoshino
Yamada Hajime
Hideki Kawamura
Colonel Nakamura
Yukio Yoshino
Application Number:
JP2002161315A
Publication Date:
July 04, 2007
Filing Date:
June 03, 2002
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/54; H03H9/17; H03H9/56; H03H9/58; (IPC1-7): H03H9/54; H03H9/17; H03H9/58
Domestic Patent References:
| JP58121817A | ||||
| JP58137317A | ||||
| JP2001024476A | ||||
| JP2001244778A | ||||
| JP2001326553A |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office
Kenzo Hara
Kenzo Hara