POSITIONING DEVICE

Japanese Patent JPS62106509

A

PURPOSE:To improve greatly both the positioning accuracy and the stopping performance of a positioning device by deciding the stopping position of a mobile body like an X/Y stage in consideration of not only the shift amount from the target stop position but the moving speed of the mobile body. CONSTITUTION:The speed servocontrol is carried out in a section between time points t1 and t4 and the position control is carried out in a section PS between time points t4 and t6 respectively. The section SS includes an acceleration section AB where the acceleration is applied at a fixed rate, a high and fixed speed section BC where a mobile body moves a high and fixed speed Vmax, a section CD where the deceleration is applied at a fixed rate, and a low and fixed speed section DE where the mobile body moves at a low and fixed speed Vmin. The length of these linear sections AB, BC and CD of acceleration and deceleration and the position of a DOWN speed switching position C are decided from the difference between the present position (start point A) and a target position P, i.e., a shift distance of the mobile body. That is, a microprocessor CP obtains the acceleration/deceleration, the maximum speed and the DOWN speed switching point with reference to a data table and in response to the shift distance of the mobile body.

JPS6231853	QUARTZ MASK
JPS6354673	METHOD AND DEVICE FOR INSPECTION
JPS62281327	APPARATUS FOR ORGANICALLY TREATING SEMICONDUCTOR DEVICE

IGARASHI HAJIME
YAMAMURA MITSUGI

JP24625185A

May 18, 1987

November 05, 1985

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CANON KK

H01L21/30; G05B19/19; H01L21/027; H01L21/67; H01L21/68; (IPC1-7): G05B19/405; H01L21/30; H01L21/68

JP55093003B
JPS57161908A	1982-10-05
JPS5014988A	1975-02-17

Tatsuo Ito

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