Title:
POSITIVE TYPE PHOTOSENSITIVE COMPOSITION
Document Type and Number:
Japanese Patent JPH05158230
Kind Code:
A
Abstract:
PURPOSE: To ensure high photosensitivity and to form a clear image.
CONSTITUTION: This positive type photosensitive compsn. contains a diazonium salt represented by the formula and an alkali-soluble polymer. In the formula, R1 is 3-18C alkyl or substd. alkyl, R2 is H, alkyl, substd. alkyl, aryl, substd. aryl, alkoxy, substd. alkoxy, phenoxy, substd. phenoxy or halogen, A is an org. group, X- is a counter anion, (n) is an integer of 1-4, (m) is an integer of 1-3 and (n)+(m)=4.
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Inventors:
KONDO SHUNICHI
TSUCHIYA MITSUMASA
ISHIGE SADAO
SUGIYAMA TAKEKATSU
TSUCHIYA MITSUMASA
ISHIGE SADAO
SUGIYAMA TAKEKATSU
Application Number:
JP32585991A
Publication Date:
June 25, 1993
Filing Date:
December 10, 1991
Export Citation:
Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F3/10; G03F7/00; G03F7/016; G03F7/039; H01L21/027; (IPC1-7): G03F3/10; G03F7/00; G03F7/016; G03F7/039; H01L21/027
Attorney, Agent or Firm:
Minoru Nakamura (7 outside)