PURPOSE: To measure the pressure distribution of a fluid on the surface of an object with a simple configuration and a compact device easily and to obtain an accurate measurement result even if the surface of a thin object is to be measured.
CONSTITUTION: A pressure detection sensor 1 is provided with a conductive plate-shaped body 2 which is elastically deformable in thickness direction. A number of first electrodes 11 are provided on one outer surface 6 of the plate- shaped body 2 and a second electrode 12 corresponding to the first electrode 11 is provided on the other outer surface 8 of the plate-shaped body 2. The side of one outer surface 6 out of both outer surfaces of the plate-shaped body 2 can be applied to the surface of a measurement object and the side of the other outer surface 8 of the plate-shaped body 2 is a pressure-reception surface 19 which receives pressure from a fluid.
| JP2000338143 | AMPERE-HOUR SENSOR |
| WO/2017/209982 | FORCE SENSOR FOR USE IN A STYLUS |
| JP4203617 | Semiconductor detection element and detection method |
OKUDA YASUO
KAWAMURA SUMIO
OKUDA YASUO
KAWAMURA SUMIO
| JPH0456008A | 1992-02-24 | |||
| JPH0436627A | 1992-02-06 | |||
| JPH02193030A | 1990-07-30 |
Next Patent: CHEMICAL ETCHING APPARATUS COMBINED WITH LASER