To provide a pressure regulating device for finely regulating the internal pressure in a glove box according to external pressure, while reducing operation cost.
A glove box 1 includes a work space 2 filled with high-purity gas and sealed from the outside, a gas introduction path 10 for introducing the high-purity gas, and a gas discharge path 20 for discharging the gas. The glove box 1 includes: differential pressure detection means of detecting a pressure difference between the internal pressure and the external pressure; first opening/closing means 13 for opening and closing the gas introduction path 10; second opening/closing means 22 for opening and closing the gas discharge path 20; forcible exhaust means 30, 34 provided in the gas discharge path 20 and forcibly exhausting the gas in the glove box 1; differential pressure computation means for determining differential pressure between the internal pressure and the external pressure; and pressure regulating means for controlling the first opening/closing means 13, second opening/closing means 22, and forcible exhaust means 30, 34 so that the differential pressure computed by the differential pressure computation means may be equal to or less than a predetermined value.
TAKAGI HIDEO
SAKURAI KAZUO
| JPH10146791A | 1998-06-02 | |||
| JP2010282950A | 2010-12-16 | |||
| JPH0238770A | 1990-02-08 | |||
| JPH08160193A | 1996-06-21 |