PROBE FOR PROBE MICROSCOPE AND ITS MANUFACTURING METHOD, PROBE MICROSCOPE, NEEDLE-SHAPED BODY AND ITS MANUFACTURING METHOD, AND ELECTRONIC ELEMENT AND ITS MANUFACTURING METHOD

Title:

PROBE FOR PROBE MICROSCOPE AND ITS MANUFACTURING METHOD, PROBE MICROSCOPE, NEEDLE-SHAPED BODY AND ITS MANUFACTURING METHOD, AND ELECTRONIC ELEMENT AND ITS MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP2005308652

Kind Code:

A

Abstract:

To provide a probe for a probe microscope, for highly accurately performing analysis of a charge density wave nano structure, structure determination on biomacromolecules, etc. by actively utilizing macroscopic quantum phase information on a charge density wave, and moreover, suitably used for a downsized charge density wave quantum phase microscope, etc.

A material film 22 is deposited on a surface of a conical body 21 made of Si, etc. An electronic beam 23 is irradiated to a part a prescribed distance away from an end part of the conical body 21 along its side surface on condition that the conical body 21 is kept from melting. This causes a needle crystal 24 to grow with the material film 22 used, thereby manufacturing the probe for a probe microscope.

Inventors:

TANDA SATOSHI
INAGAKI KATSUHIKO
OKAWA HIROYUKI
TOYOSHIMA GOJI

Application Number:

JP2004128771A

Publication Date:

November 04, 2005

Filing Date:

April 23, 2004

Export Citation:

Click for automatic bibliography generation Help

Assignee:

JAPAN SCIENCE & TECH AGENCY

International Classes:

B82B1/00; B82B3/00; G01Q60/00; G01Q60/16; G01Q70/00; G01Q70/14; G01Q70/16; (IPC1-7): G01N13/10; B82B1/00; B82B3/00; G01N13/12; G12B21/02

Domestic Patent References:

JP2002181682A	2002-06-26
JP2003240700A	2003-08-27
JPH04233406A	1992-08-21
JP2002181682A	2002-06-26
JP2003240700A	2003-08-27
JPH04233406A	1992-08-21

Other References:

JPN6009062119, 大河裕之、豊嶋剛司、常田啄、西田宗人、稲垣克彦、丹田聡, "ＴａＳ２，ＴａＳｅ２電荷密度波（ＣＤＷ）による操作型顕微鏡の開発", 第５１回応用物理学関係連合講演会講演予稿集第２分冊, 20040328, 第７４４頁
JPN6009062122, Ｄ．　Ｇｏｌｂｅｒｇ，　Ｙ．　Ｂａｎｄｏ，　Ｍ．　Ｅｒｅｍｅｔｓ，　Ｋ．　Ｔａｋｅｍｕｒａ，　Ｋ．　Ｋｕｒａｓｈｉｍａ，　ａｎｄ　Ｈ．　Ｙｕｓａ, "Ｎａｎｏｔｕｂｅｓ　ｉｎ　ｂｏｒｏｎ　ｎｉｔｒｉｄｅ　ｌａｓｅｒ　ｈｅａｔｅｄ　ａｔ　ｈｉｇｈ　ｐｒｅｓｓｕｒｅ", ＡＰＰＬＩＥＤ　ＰＨＹＳＩＣＳ　ＬＥＴＴＥＲＳ, 19960930, Ｖｏｌ．　６９，　Ｎｏ．　１４, ｐ．　２０４５−２０４７
JPN6009062125, Ｊｅａｎ　Ｐｉｅｒｒｅ　ＢＯＮＮＥＴ，　ｅｔ　ａｌ, "ＮＥＥＤＬＥＳ　ＯＦ　ＷＯ２．９　ＧＲＯＷＮ　ＩＮ　ＡＮ　ＥＬＥＣＴＲＯＮ　ＭＩＣＲＯＳＣＯＰＥ", Ｊｏｕｒｎａｌ　ｏｆ　Ｃｒｙｓｔａｌ　Ｇｒｏｗｔｈ, 1982, Ｖｏｌ．５６，　Ｎｏ．　３, ｐ．　６３３−６３８
JPN6009062127, 岡島吉俊、他, "新しいＣＤＷ干渉系における非線形電気伝導の観測", 日本物理学会講演概要集, 1999, 第５４巻第２号（１９９９年秋の分科会）第, 第６９８頁
JPN6009062129, 丹田聡、他, "新しいトポロジーをもつリング状及びチューブ状ＣＤＷ物質の創成", 日本物理学会講演概要集, 1999, 第５４巻第２号（１９９９年秋の分科会）第, 第７７６頁
JPN7009005232, Ｔ．　Ｌ．　Ａｄｅｌｍａｎ，　Ｓ．　Ｖ．　Ｚａｉｔｓｅｖ−Ｚｏｔｏｖ，　ａｎｄ　Ｒ．　Ｅ．　Ｔｈｏｒｎｅ, "Ｆｉｅｌｄ−Ｅｆｆｅｃｔ　Ｍｏｄｕｌａｔｉｏｎ　ｏｆ　Ｃｈａｒｇｅ−Ｄｅｎｓｉｔｙ−Ｗａｖｅ　Ｔｒａｎｓｐｏｒｔ　ｉｎ　ＮｂＳｅ３　ａｎｄ　ＴａＳ３", ＰＨＹＳＩＣＡＬ　ＲＥＶＩＥＷ　ＬＥＴＴＥＲＳ, 19950626, Ｖｏｌｕｍｅ．　７４，　Ｎｕｍｂｅｒ．　２６, ｐ．　５２６４−５２６７

Attorney, Agent or Firm:

Koichi Mori

Previous Patent: SCANNING PROBE MICROSCOPE AND ITS USING METHOD

Next Patent: CHARGE DENSITY WAVE QUANTUM PHASE MICROSCOPE AND CHARGE DENSITY WAVE QUANTUM INTERFEROMETER