Title:
PRODUCTION CONTROL SYSTEM, AND HOST COMPUTER AND RECORDING MEDIUM USED FOR THE SAME
Document Type and Number:
Japanese Patent JP3684501
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a production control system for a sputtering target which enables a target user to efficiently operate a sputtering device and also enables a target maker to greatly shorten the period of delivery of the sputtering target and a medium where a program for the production control system is recorded.
SOLUTION: The production control system for the sputtering target which uses a computer network is structured between the target maker and target user and various information regarding production control such as history information on a backing plate, production information on the sputtering target, and use information on the sputtering target is shared.
Inventors:
Koichi Nakajima
Noriyuki Yajima
Kenichi Wataya
Noriyuki Yajima
Kenichi Wataya
Application Number:
JP2000349139A
Publication Date:
August 17, 2005
Filing Date:
November 16, 2000
Export Citation:
Assignee:
Nikko Materials Co., Ltd.
International Classes:
G06Q10/06; C23C14/34; G05B19/418; G06Q50/00; G06Q50/04; (IPC1-7): G06F17/60; C23C14/34; G05B19/418
Domestic Patent References:
| JP2000035994A |
Attorney, Agent or Firm:
Hiroshi Arafune
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