To provide a production method of a hydrogen gas separation membrane having both a further higher gas transmissivity and a further higher transmission coefficient ratio.
Porous silica membrane 16 formed on a support body 12 by a membrane forming liquid coating process P3 and a firing process P4, has pin holes 48 with relatively large fine holes exceeding 0.6 nm, and super-micro holes 50 less than 0.6 nm. The diameters of the fine holes are reduced less than 0.6 nm by selective membrane formation of silica on the surface of inner walls of the pin holes 48 in a chemical vapor deposition process P5. Therefore, while fine holes of super-micro holes 50 suited to hydrogen gas separation are maintained, only fine holes of the pin holes 48 larger than them are exclusively reduced, thus, fine hole diameters of appropriate size are provided in a narrow distribution, to obtain the hydrogen gas separation membrane 10 having both a high gas transmissivity and a high transmission coefficient ratio.
YOSHINO YASUSHI
NAKAO SHINICHI
NOMURA MIKIHIRO
SUGAWARA TAKASHI
GOPALAKRISHNAN SURAJ
| JP2004123415A | 2004-04-22 | |||
| JP2000000444A | 2000-01-07 | |||
| JP2001062265A | 2001-03-13 | |||
| JPH0838864A | 1996-02-13 | |||
| JPH04104822A | 1992-04-07 | |||
| JPH0751551A | 1995-02-28 |
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