Title:
PROJECTION ALIGNER
Document Type and Number:
Japanese Patent JP2015079814
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To solve the problem in which: a method of measuring an image formation position in an optical system requires the alignment of a mark on the mask side and a mark on the plate stage side and the measurement of the amount of light by driving the plate stage a plurality of times in the optical axis direction, and the measurement takes time and cannot be frequently conducted; if the measurement is conducted with an unreasonably short measurement interval, the correction of the image formation position may be unnecessarily conducted, which causes a reduction in tact time.SOLUTION: A projection aligner includes a temperature measurement mechanism that detects the temperature of an object and space irradiated with exposure light, and has temperature measurement means for measuring temperature by using the temperature measurement mechanism and image formation position correction means for measuring a change of the image formation position of a projection optical system when the amount of change of the temperature exceeds a threshold.
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Inventors:
SUZUKI TORU
Application Number:
JP2013215194A
Publication Date:
April 23, 2015
Filing Date:
October 16, 2013
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G01B11/00; G03F9/02
Attorney, Agent or Firm:
Yukio Takanashi
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