Title:
保持機構
Document Type and Number:
Japanese Patent JP7418924
Kind Code:
B2
Abstract:
A holding mechanism includes a Bernoulli pad that holds a plate-shaped body, a hand on which the Bernoulli pad is disposed, a sensor that is disposed on the hand and detects that the plate-shaped body is held under suction by the Bernoulli pad, a lateral movement restriction section disposed on the hand, a tube that connects an air source supplying air to the Bernoulli pad and the Bernoulli pad, an adjustment valve that is disposed in the tube and adjusts a flow rate of air supplied to the Bernoulli pad, and a control section that controls operation of the adjustment valve. The control section gradually increases the flow rate of the air supplied from the adjustment valve to the Bernoulli pad and, when it is detected by the sensor that the plate-shaped body has been held under suction by the Bernoulli pad, fixes the flow rate of the air.
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Inventors:
Yoshinori Kakinuma
Yoshikuni Uyama
Yoshinobu Saito
Ryu Zhong Hyun
Yoshikuni Uyama
Yoshinobu Saito
Ryu Zhong Hyun
Application Number:
JP2020084542A
Publication Date:
January 22, 2024
Filing Date:
May 13, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/677; B25J15/06
Domestic Patent References:
| JP2017062490A | ||||
| JP2014165470A | ||||
| JP2009272337A |
Foreign References:
| WO2017179296A1 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano