化学増幅型レジスト組成物の酸発生剤用の塩

Title:

化学増幅型レジスト組成物の酸発生剤用の塩

Document Type and Number:

Japanese Patent JP5070814

Kind Code:

B2

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Inventors:

Norifumi Yamaguchi
Yukako Harada
Isao Yoshida

Application Number:

JP2006311244A

Publication Date:

November 14, 2012

Filing Date:

November 17, 2006

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C07C381/12; C07C303/22; C07C309/17; C07D333/46; C08K5/42; C08L101/02; G03F7/004; C07B61/00

Domestic Patent References:

Attorney, Agent or Firm:

Toru Nakayama

Previous Patent: JPS5070813

Next Patent: 排ガス処理方法