Title:
SAMPLE OBSERVATION DEVICE, SAMPLE OBSERVATION METHOD, AND COMPUTER SYSTEM
Document Type and Number:
Japanese Patent JP2023012844
Kind Code:
A
Abstract:
To provide a technique capable of reducing operations such as taking an actual image in observing a sample.SOLUTION: In a learning phase S1, a processor of a sample observation device stores sample design data 250 in a storage resource, creates a first learning image as a plurality of input images 251, creates a second learning image as a target image 252, and leans a model 260 relating to image quality conversion using the first learning image and the second learning image. In a sample observation phase S2, the processor obtains a second captured image 254 by inputting and outputting a first captured image 253 obtained by capturing the sample by an imaging device to and from the model 260 as an image for observation. The processor creates at least one of the first learning image and the second learning image on the basis of the design data.SELECTED DRAWING: Figure 2
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Inventors:
ITO AKIRA
MIYAMOTO ATSUSHI
KONDO NAOAKI
NAKAYAMA HIDEKI
MIYAMOTO ATSUSHI
KONDO NAOAKI
NAKAYAMA HIDEKI
Application Number:
JP2021116563A
Publication Date:
January 26, 2023
Filing Date:
July 14, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01J37/22; G01B15/04; G01N23/2251; G06T7/00; H01L21/66
Attorney, Agent or Firm:
Patent Attorney Tsutsui International Patent Office
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