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Title:
試料処理装置及び試料処理システム
Document Type and Number:
Japanese Patent JP4520820
Kind Code:
B2
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Inventors:
Kunihiko Ikuhara
Hideyuki Yamamoto
Application Number:
JP2004311646A
Publication Date:
August 11, 2010
Filing Date:
October 27, 2004
Export Citation:
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Assignee:
Hitachi High-Technologies Corporation
International Classes:
C23C16/52; H01L21/3065; H01L21/02
Domestic Patent References:
JP8005542A
JP11170144A
JP4212414A
Attorney, Agent or Firm:
Polaire Patent Business Corporation
Katsuo Ogawa
Kyosuke Tanaka



 
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