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Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2014027104
Kind Code:
A
Abstract:

To provide a semiconductor device and a manufacturing method of the same which can reduce chip area.

A semiconductor device according to an embodiment comprises: a laminate which includes a plurality of conductive layers and a plurality of insulation layers each provided every between the conductive layers, and includes a step-like structure part having a step array in which steps of the plurality of conductor layers are arranged in a row in a first direction in a step-wise manner; and a plurality of vias which are provided on respective steps in the step-like structure part and reach the conductive layers of respective steps. The step array includes a deepest part, one step provided adjacently to the deepest part in the first direction and having a level difference of one stage from the deepest part, and a plurality of steps each having a level difference of multiple stages from the respective neighboring steps in the first direction.


Inventors:
KIDO NOZOMI
KOMORI YOSUKE
Application Number:
JP2012166071A
Publication Date:
February 06, 2014
Filing Date:
July 26, 2012
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/8247; H01L21/336; H01L27/10; H01L27/115; H01L29/788; H01L29/792
Domestic Patent References:
JP2012119478A2012-06-21
JP2010192589A2010-09-02
Foreign References:
US20120132983A12012-05-31
US20100207186A12010-08-19
Attorney, Agent or Firm:
Masahiko Hinataji