Title:
半導体装置
Document Type and Number:
Japanese Patent JP6604730
Kind Code:
B2
Abstract:
A semiconductor device has a magnetic sensor configured to detect a direction of magnetism. The magnetic sensor includes Hall elements arranged on a surface of a semiconductor substrate, and a magnetic flux concentrator formed of a magnetic material having the function of amplifying magnetism. The magnetic flux concentrator is arranged on the semiconductor substrate and at least partly covers each of the Hall elements. A slit or a slot is formed in the magnetic material to inhibit generation of stress applied to the Hall elements.
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Inventors:
Mika Ebihara
Application Number:
JP2015053799A
Publication Date:
November 13, 2019
Filing Date:
March 17, 2015
Export Citation:
Assignee:
Abric Co., Ltd.
International Classes:
G01R33/07; G01R33/02
Domestic Patent References:
| JP200271381A | ||||
| JP2007263721A | ||||
| JP2003142752A | ||||
| JP2222849A | ||||
| JP2016164549A |
Foreign References:
| US20110193556 | ||||
| WO2007119569A1 | ||||
| US20140367813 |