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Title:
SEMICONDUCTOR MANUFACTURING EQUIPMENT
Document Type and Number:
Japanese Patent JPS6225423
Kind Code:
A
Abstract:

PURPOSE: To enable the modification of the work at every working unit smaller than standard work by setting a parameter of executing the work by a unit smaller than the working unit of the standard.

CONSTITUTION: When a main operation start command and a jig file name used in the execution of a specific sequence are input from a keyboard 12 in a command input queue state, a console CPU 21 retrieves a file stored in an external memory 32 to read out the corresponding jig file. If the job file contains a shot map file, a CRT 12 displays the specific ones of the operation parameters different at every content and shot. The specific parameter has high modification by an operator. Thereafter, the operation parameter is modified as required. Thus, the operation parameter can be set at shot unit, and the specific work can be automatically executed at unit smaller than standard work.


Inventors:
SATO RYUICHI
NUMATA MASANORI
HAMAZAKI FUMIYOSHI
AYADA NAOKI
Application Number:
JP16480485A
Publication Date:
February 03, 1987
Filing Date:
July 25, 1985
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/30; G03F7/20; G03F7/22; H01L21/027; (IPC1-7): G03F7/22; H01L21/30
Attorney, Agent or Firm:
Tatsuo Ito