Title:
SEMICONDUCTOR MEMORY
Document Type and Number:
Japanese Patent JPS52155074
Kind Code:
A
Abstract:
PURPOSE: A semiconductor memory is made to a small size, to have two wirings and to uniform characteristics by combination of the regions formed simply by ion implantation of 1 kind of impurity and MNOS structure.
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Inventors:
HIRABAYASHI KANJI
KONAKA MASAMI
KONAKA MASAMI
Application Number:
JP7193376A
Publication Date:
December 23, 1977
Filing Date:
June 18, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L27/10; H01L21/8242; H01L21/8247; H01L27/108; H01L29/788; H01L29/792; (IPC1-7): G11C11/34; H01L27/10; H01L29/40
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