Title:
SENSOR CHIP CALIBRATION METHOD AND MANUFACTURING LINE FOR CALIBRATED SENSOR CHIP
Document Type and Number:
Japanese Patent JP2016075683
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for calibrating a sensor chip.SOLUTION: To perform first calibration measurement by a sensor chip to obtain first calibration data. To perform one manufacturing step for the sensor chip. To perform another calibration measurement by the sensor chip to obtain another calibration data. To obtain final calibration data from the first calibration data and another calibration data to store it into the memory 94 of the sensor chip.SELECTED DRAWING: Figure 4
Inventors:
CHRISTOPH SCHANZ
EVA POULSEN
PASCAL GERNER
MARKUS GRAF
EVA POULSEN
PASCAL GERNER
MARKUS GRAF
Application Number:
JP2015197676A
Publication Date:
May 12, 2016
Filing Date:
October 05, 2015
Export Citation:
Assignee:
SENSIRION AG
International Classes:
G01D18/00; G01N27/12
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno