Title:
SHAPE MEASURING MACHINE AND ALIGNMENT METHOD FOR SHAPE MEASURING MACHINE
Document Type and Number:
Japanese Patent JP2022129887
Kind Code:
A
Abstract:
To provide a shape measuring machine and an alignment method for a shape measuring machine that can adjust a detection direction and a movement direction of a probe to improve accuracy of displacement measurement.SOLUTION: A shape measuring machine (10) comprises: a stage rotation mechanism that rotates a stage on which workpiece is placed around a rotation axis; a probe that detects a surface shape of the workpiece along a detection direction; a probe rotation mechanism that rotates the probe around a probe rotation axis; a direct acting mechanism that moves the probe along a direct acting movement direction; detection means that moves the probe between at least two probe positions along the direct acting movement direction and detects, for every probe position, a position of an intersection of the detection direction of the probe and a plane perpendicular to the direct acting movement direction; and drive control means that controls the probe rotation mechanism to rotate the probe so that the positions of the intersections substantially match each other.SELECTED DRAWING: Figure 1
Inventors:
MORIYAMA KATSUFUMI
MORII HIDEKI
MORII HIDEKI
Application Number:
JP2021028748A
Publication Date:
September 06, 2022
Filing Date:
February 25, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01B5/20; G01B11/00; G01B11/24
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
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